9789310254444
Aruna Sareen
Vishwa Jyoti Press
English
Physics: Science and Engineering - Physics: Science and Engineering
2020
13125.00
Ultrathin, Continuous Platinum Atomic Layer Deposition on High Surface Area Substrates, and Mass Spectrometer Characterization of Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching: Studies in Atomic Scale Materials and Processing
