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Ultrathin, Continuous Platinum Atomic Layer Deposition on High Surface Area Substrates, and Mass Spectrometer Characterization of Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching: Studies in Atomic Scale Materials and Processing
Book Details :
Ultrathin, Continuous Platinum Atomic Layer Deposition on High Surface Area Substrates, and Mass Spectrometer Characterization of Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching: Studies in Atomic Scale Materials and Processing